[4]. Wu AM, Jiang X, Liu BD, Lin GQ, Li Q, Zou RX, A multi-array hot wire device for diamond film preparation with vertical layout, 2016.06.29, 201410241054.7.
Release time:2023-06-19 Hits:

Abstract: A multi-array hot wire device for preparing diamond film in vertical layout, belongs to the field of coating technology, the device includes an upper wall plate of vacuum chamber and a lower wall plate of vacuum chamber, characterized in that: the upper electrode plate is fixedly connected to the upper wall plate of vacuum chamber; at least two rows of hot wires are vertically distributed, the upper end of each row of hot wires is fixedly connected to its corresponding upper electrode plate, the lower end of each row of hot wires is fixedly connected to its corresponding lower electrode plate; the lower electrode plate The lower end of the lower electrode plate is fixed above the hot wire adjusting mechanism, and the hot wire adjusting mechanism is fixed above the lower wall plate of the vacuum chamber. The device adopts the vertical distribution of multiple arrays of hot wires, which can coat a large area on both sides and reduce the cost of hot wires. hot wire oscillation to achieve uniform coating.