Education: Master's degree

Degree: Master

Status: Graduated

Thesis title: Linear coaxial coupled microwave plasma diagnosis and silicon thin film preparation

Research Direction: Microwave plasma diagnosis and thin film preparation

Graduation destination: Huawei Technologies Co.

Introduction: Large-area, stable and controllable plasma sources have been a hot spot for research, and have wide application prospects in solar cells and semiconductor thin film materials. The electron density and electron temperature of plasma have been two important physical parameters in plasma diagnosis, and the electron density and electron temperature have a great influence on the quality of thin films. The thesis firstly diagnosed and optimized the linear coaxially coupled microwave plasma discharge parameters and their spatial distribution uniformity by using Langmuir single-probe method, then prepared and characterized the quality of polysilicon thin film under different process conditions based on orthogonal experimental method, and effectively optimized the polysilicon thin film growth process, and explored and revealed its influence law on solar cell performance.

Entrance date: 2011-09-01

Graduation date: 2014-06-30

Email: 390572142@qq.com