Abstract: A high-temperature conductive and corrosion-resistant Ti-Nb-Ta alloy thin film material applied to the probe surface and its preparation method belong to the field of metal material surface modification and new material technology. The alloy thin film material includes three elements Ti, Nb and Ta, and the atomic percentages of its alloy composition are expressed as Tix-Nby-Ta1-x-y, where x = 97-98.4% and y = 0.8-1.5%; the composition of the material The design is based on the structural model of clusters + linked atoms, combined with the bond-over-percolation model. The Ti, Nb, Ta ternary alloy thin film material is prepared on the substrate surface using high vacuum multi-target magnetron sputtering technique. The invention is simple, fast deposition, high productivity and low cost, and the prepared thin film material has good corrosion resistance, oxidation resistance and electrical conductivity at high temperature, which is suitable for processing technology field.